Browsing by author "Rangelow, Ivo"
Now showing items 1-5 of 5
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Advanced etching for nanodevices and 2D materials
de Marneffe, Jean-Francois; Cooke, Mike; Goodyear, Andy; Braithwaite, Nicolas; Sutton, Yvonne; Bowden, Mark; Altamirano Sanchez, Efrain; Zotovich, Alexey; El Otell, Ziad; Chan, BT; Knoll, Armin; Rawlings, Colin; Duerig, Urs; Spiesser, Martin; Kaestner, Marcus; Neuber, Christian; Rangelow, Ivo (2016) -
High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint technology
Lenk, Claudia; Krivoshapkina, Yana; Hofmann, Martin; Lenk, Steve; Tzvetan, Ivanov; Rangelow, Ivo; Ahmad, Ahmad; Reum, Alexander; Holz, M; Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chan, BT; El Otell, Ziad; de Marneffe, Jean-Francois (2019) -
Molecular glass resists for all-dry high-resolution scanning probe lithography
Neuber, Christian; Cooke, Mike; Despont, Michel; Durig, Urs; Kastner, Markus; Knoll, Armin; de Marneffe, Jean-Francois; Rangelow, Ivo; Rawlings, Colin; De Schepper, Peter; Schmidt, Hans-Werner; Strohriegl, Peter (2013) -
Molecular glass resists for scanning probe lithography
Neuber, Christian; Ringk, Andreas; Kolb, Tristan; Wieberger, Floryan; Strohriegl, Peter; Schimdt, Hans-Werner; Fokkema, Vincent; Cooke, Mike; Rawlings, Colin; Durig, Urs; Knoll, Armin; de Marneffe, Jean-Francois; De Schepper, Peter; Kaestner, Marcus; Krivoshapkina, Yana; Budden, Matthias; Rangelow, Ivo (2014) -
Wafer-level nanoimprint lithography for single electron transistors
Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chouiki, M.; Lenk, Claudia; Krivoshapkina, Y.; Hoffmann, M.; Lenk, Steve; Rangelow, Ivo; Chan, BT; de Marneffe, Jean-Francois (2017)