Wafer-level nanoimprint lithography for single electron transistors

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Authors
Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chouiki, M.; Lenk, Claudia; Krivoshapkina, Y.; Hoffmann, M.; Lenk, Steve; Rangelow, Ivo; Chan, BT; de Marneffe, Jean-Francois
Conference
16th International Conference on Nanoimprint and Nanoprint Technology - NNT
Title
Wafer-level nanoimprint lithography for single electron transistors
Publication type
Meeting abstract
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