Publication:

Wafer-level nanoimprint lithography for single electron transistors

Date

2017
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorGlinsner, Thomas
dc.contributor.authorEibelhuber, Martin
dc.contributor.authorTreiblmayr, Dominik
dc.contributor.authorSchamberger, Barbara
dc.contributor.authorChouiki, M.
dc.contributor.authorLenk, Claudia
dc.contributor.authorKrivoshapkina, Y.
dc.contributor.authorHoffmann, M.
dc.contributor.authorLenk, Steve
dc.contributor.authorRangelow, Ivo
dc.contributor.authorChan, BT
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-24T05:06:11Z
dc.date.available2021-10-24T05:06:11Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28402
dc.source.conference16th International Conference on Nanoimprint and Nanoprint Technology - NNT
dc.source.conferencedate8/11/2017
dc.source.conferencelocationChangwon Korea
dc.title

Wafer-level nanoimprint lithography for single electron transistors

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions