Molecular glass resists for scanning probe lithography

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Authors
Neuber, Christian; Ringk, Andreas; Kolb, Tristan; Wieberger, Floryan; Strohriegl, Peter; Schimdt, Hans-Werner; Fokkema, Vincent; Cooke, Mike; Rawlings, Colin; Durig, Urs; Knoll, Armin; de Marneffe, Jean-Francois; De Schepper, Peter; Kaestner, Marcus; Krivoshapkina, Yana; Budden, Matthias; Rangelow, Ivo
Conference
Alternative Lithographic Technologies VI
Title
Molecular glass resists for scanning probe lithography
Publication type
Proceedings paper
Embargo date
9999-12-31
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