Publication:

Molecular glass resists for scanning probe lithography

Date

2014

Proceedings Paper

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Files

27914.pdf 4.9 MB

Author(s)

Neuber, Christian

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;

;

Wieberger, Floryan

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Strohriegl, Peter

;

Schimdt, Hans-Werner

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Fokkema, Vincent

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;

Rawlings, Colin

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;

;

de Marneffe, Jean-Francois

;

De Schepper, Peter

;

Kaestner, Marcus

;

Krivoshapkina, Yana

;

Budden, Matthias

;

Metrics

2020 since deposited on 2021-10-22

Acq. date: 2025-12-10