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Molecular glass resists for scanning probe lithography
Publication:
Molecular glass resists for scanning probe lithography
Date
2014
Proceedings Paper
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27914.pdf
4.9 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Neuber, Christian
;
Ringk, Andreas
;
Kolb, Tristan
;
Wieberger, Floryan
;
Strohriegl, Peter
;
Schimdt, Hans-Werner
;
Fokkema, Vincent
;
Cooke, Mike
;
Rawlings, Colin
;
Durig, Urs
;
Knoll, Armin
;
de Marneffe, Jean-Francois
;
De Schepper, Peter
;
Kaestner, Marcus
;
Krivoshapkina, Yana
;
Budden, Matthias
;
Rangelow, Ivo
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2019
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Acq. date: 2025-10-24
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Metrics
Views
2019
since deposited on 2021-10-22
434
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations