Browsing by author "De Cooman, Johan"

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Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

Armini, Silvia; Sun, Yiting; Loyo Prado, Jana; Baumans, Kim; De Cooman, Johan; Redzheb, Murad; Verdonck, Patrick; Swerts, Johan; Baklanov, Mikhaïl; Struyf, Herbert (2013)