Publication:

Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

Date

2013
Meeting abstract
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Author(s)

Armini, Silvia  
;
Sun, Yiting  
;
Loyo Prado, Jana  
;
Baumans, Kim  
;
De Cooman, Johan  
;
Redzheb, Murad
;
Verdonck, Patrick  
;
Swerts, Johan  
;
Baklanov, Mikhaïl
;
Struyf, Herbert  

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