Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

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Authors
Armini, Silvia; Sun, Yiting; Loyo Prado, Jana; Baumans, Kim; De Cooman, Johan; Redzheb, Murad; Verdonck, Patrick; Swerts, Johan; Baklanov, Mikhaïl; Struyf, Herbert
Conference
Materials for Advanced Metallization - MAM
Title
Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics
Publication type
Meeting abstract
Embargo date
9999-12-31
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