Publication:

Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

Date

2013
Meeting abstract
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dc.contributor.authorArmini, Silvia
dc.contributor.authorSun, Yiting
dc.contributor.authorLoyo Prado, Jana
dc.contributor.authorBaumans, Kim
dc.contributor.authorDe Cooman, Johan
dc.contributor.authorRedzheb, Murad
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorSwerts, Johan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorLoyo Prado, Jana
dc.contributor.imecauthorBaumans, Kim
dc.contributor.imecauthorDe Cooman, Johan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-21T06:42:50Z
dc.date.available2021-10-21T06:42:50Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21982
dc.source.beginpage125
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate11/03/2013
dc.source.conferencelocationLeuven belgium
dc.source.endpage126
dc.title

Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

dc.typeMeeting abstract
dspace.entity.typePublication
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