Browsing by author "Marcuccilli, Gino"
Now showing items 1-3 of 3
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Detection of split design-related weak points in double patterning using PQW and bright-field defect inspection
Van Den Heuvel, Dieter; Cheng, Shaunee; Leray, Philippe; Wiaux, Vincent; Maenhoudt, Mireille; D'have, Koen; Jaenen, Patrick; Marcuccilli, Gino; Malik, Irfan; Klein, Sophie (2008) -
Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography
Van Den Heuvel, Dieter; Jonckheere, Rik; Cheng, Shaunee; Marcuccilli, Gino; Cross, Andrew; Inderhees, Greg; Parisi, Paolo (2012) -
Quantitative pattern collapse metrology for 193nm immersion lithography
Winroth, Gustaf; Gronheid, Roel; Lin, Chua; Neishi, Katsumi; Harukawa, Ryota; Marcuccilli, Gino (2011)