Authors

Van Den Heuvel, Dieter; Jonckheere, Rik; Cheng, Shaunee; Marcuccilli, Gino; Cross, Andrew; Inderhees, Greg; Parisi, Paolo

Conference

Metrology, Inspection, and Process Control for Microlithography XXVI

Title

Investigation of the performance of state-of-the-art defect inspection tools within EUV lithography

Publication type

Proceedings paper

Embargo date

9999-12-31