Browsing by author "Miya, Katsuhiko"

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Application of single-wafer wet cleaning prior to epitaxial SiGe process

Sano, K.; Wada, Masayuki; Leys, Frederik; Loo, Roger; Mertens, Paul W.; Snow, James; Izumi, Akira; Miya, Katsuhiko; Eitoku, Atsuro (2008)
Application of single-wafer wet cleaning prior to epitaxial SiGe process

Sano, Ken-Ichi; Wada, Masayuki; Leys, Frederik; Loo, Roger; Hikavyy, Andriy; Mertens, Paul; Snow, Jim; Izumi, A.; Miya, Katsuhiko; Eitoku, Atsuro (2009)