Application of single-wafer wet cleaning prior to epitaxial SiGe process

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Authors
Sano, K.; Wada, Masayuki; Leys, Frederik; Loo, Roger; Mertens, Paul W.; Snow, James; Izumi, Akira; Miya, Katsuhiko; Eitoku, Atsuro
Conference
9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
Title
Application of single-wafer wet cleaning prior to epitaxial SiGe process
Publication type
Meeting abstract
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