Browsing by author "Matsumoto, Yasuhiro"
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Study of porogen removal by HWCVD for the fabrication of advanced low-k films
Godavarthi, Srinivas; Wang, Cong; Verdonck, Patrick; Matsumoto, Yasuhiro; Koudriavtsev, I; Tielens, Hilde; Baklanov, Mikhaïl (2012)