Browsing by author "Beynet, J."
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Variation in process conditions of porogen-based low-k films: A method to improve performance without changing existing process steps in a sub-100 nm Cu damascene integration route
De Roest, David; Travaly, Youssef; Beynet, J.; Sprey, Hessel; Labat, J.; Huffman, Craig; Verdonck, Patrick; Kaneko, S; Matsushita, K; Kobayashi, N; Beyer, Gerald (2010)