Browsing by author "Benndorf, Michael"

Now showing items 1-2 of 2

Experimental investigation of the impact of line-edge roughness on MOSFET performance and yield

Croon, Jeroen; Leunissen, Peter; Jurczak, Gosia; Benndorf, Michael; Rooyackers, Rita; Ronse, Kurt; Decoutere, Stefaan; Sansen, Willy; Maes, Herman (2003)
Studies of the defectivity formation mechanismes between the top coats and the resists in immersion lithography

Stepanenko, Nickolay; Kishimura, Shinji; Gronheid, Roel; Maenhoudt, Mireille; Ercken, Monique; Kocsis, Michael; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Benndorf, Michael (2005)