Authors

Stepanenko, Nickolay; Kishimura, Shinji; Gronheid, Roel; Maenhoudt, Mireille; Ercken, Monique; Kocsis, Michael; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Benndorf, Michael

Conference

2nd International Symposium on Immersion Lithography

Title

Studies of the defectivity formation mechanismes between the top coats and the resists in immersion lithography

Publication type

Proceedings paper