Studies of the defectivity formation mechanismes between the top coats and the resists in immersion lithography

dc.contributor.author	Stepanenko, Nickolay
dc.contributor.author	Kishimura, Shinji
dc.contributor.author	Gronheid, Roel
dc.contributor.author	Maenhoudt, Mireille
dc.contributor.author	Ercken, Monique
dc.contributor.author	Kocsis, Michael
dc.contributor.author	Vandenbroeck, Nadia
dc.contributor.author	Van Den Heuvel, Dieter
dc.contributor.author	Benndorf, Michael
dc.contributor.imecauthor	Gronheid, Roel
dc.contributor.imecauthor	Ercken, Monique
dc.contributor.imecauthor	Kocsis, Michael
dc.contributor.imecauthor	Vandenbroeck, Nadia
dc.contributor.imecauthor	Van Den Heuvel, Dieter
dc.date.accessioned	2021-10-16T05:25:47Z
dc.date.available	2021-10-16T05:25:47Z
dc.date.issued	2005
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/11271
dc.source.conference	2nd International Symposium on Immersion Lithography
dc.source.conferencedate	12/09/2005
dc.source.conferencelocation	Brugge Belgium
dc.title	Studies of the defectivity formation mechanismes between the top coats and the resists in immersion lithography
dc.type	Proceedings paper
dspace.entity.type	Publication
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