Browsing by author "Yeo, Y.-C."

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Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

Wang, Xin Peng; Yu, HongYu; Yeo, Y.-C.; Li, M.-F.; Chang, Shou-Zen; Cho, Hag-Ju; Kubicek, Stefan; Wouters, Dirk; Groeseneken, Guido; Biesemans, Serge (2008)