Authors

Wang, Xin Peng; Yu, HongYu; Yeo, Y.-C.; Li, M.-F.; Chang, Shou-Zen; Cho, Hag-Ju; Kubicek, Stefan; Wouters, Dirk; Groeseneken, Guido; Biesemans, Serge

Conference

Symposium on VLSI Technology. Digest of Technical Papers

Title

Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

Publication type

Proceedings paper