Browsing by author "Herzog, H.J."
Now showing items 1-3 of 3
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Strain relaxation of pseudomorphic Si1-xGe/Si(100) heterostructures after Si+ ion implantation
Holländer, B.; Buca, D.; Mörschbächer, M.; Lenk, St.; Mantl, S.; Herzog, H.J.; Hackbarth, Th.; Loo, Roger; Caymax, Matty; Fichtner, P.F.P. (2004) -
Strain relaxation of pseudomorphic Si1-xGex/Si(100) heterostructures by Si+ ion implantation
Holländer, B.; Buca, D.M.; Lenk, S.; Mantl, S.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Caymax, Matty; Mörschbächer, M.; Fichtner, P.F.P. (2004) -
Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing
Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, S.; Hogg, S.M.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Bauer, R. (2003)