Authors

Mantl, S.; Holländer, B.; Hüging, N.; Luysberg, M.; Lenk, S.; Hogg, S.M.; Herzog, H.J.; Hackbarth, T.; Loo, Roger; Bauer, R.

Conference

Abstracts Book ICSI3: 3rd International Conference on SiGe(C) Epitaxy and Heterostructures

Title

Thin strain relaxed SiGe buffer layers on Si and SOI wafers made by He+ ion implantation and annealing

Publication type

Meeting abstract