Browsing by author "Moon, Kwang Jin"
Now showing items 1-2 of 2
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Electrical performance, reliability and microstructure of sub-45 nm copper damascene lines fabricated with TEOS backfill
Sphabmixay, Kim; Van Olmen, Jan; Moon, Kwang Jin; Vanstreels, Kris; D'Haen, Jan; Tokei, Zsolt; List, S.; Beyer, Gerald (2007) -
Electromigration study of ultra narrow copper lines in low-k dielectric
Croes, Kristof; Moon, Kwang Jin; Carbonell, Laure; Struyf, Herbert; Heylen, Nancy; Tokei, Zsolt; Beyer, Gerald (2007)