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Electromigration study of ultra narrow copper lines in low-k dielectric
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Authors
Croes, Kristof
;
Moon, Kwang Jin
;
Carbonell, Laure
;
Struyf, Herbert
;
Heylen, Nancy
;
Tokei, Zsolt
;
Beyer, Gerald
Conference
Advanced Materials Conference - AMC
Title
Electromigration study of ultra narrow copper lines in low-k dielectric
Publication type
Oral presentation
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