Browsing by author "Rispens, Gijsbert"
Now showing items 1-3 of 3
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Elucidating the role of imaging metrics for variability and after etch defectivity
Franke, Joern-Holger; Frommhold, Andreas; Dauendorffer, Arnaud; Nafus, Kathleen; Rispens, Gijsbert; Maslow, Mark (2022) -
Metal layer single EUV expose at pitch 28nm: how bright field and NTD resist advantages align
Franke, Joern-Holger; Frommhold, Andreas; Davydova, Natalia; Aubert, Remko; Nair, Vineet Vijayakrishnan; Kovalevich, Tatiana; Rio, David; Bekaert, Joost; Wang, Erik; Rispens, Gijsbert; Maslow, Mark; Hendrickx, Eric (2021) -
Validation of imaging benefits of Dual Monopole exposures
Brunner, Timothy A.; Franke, Joern-Holger; Truffert, Vincent; De Bisschop, Peter; Rispens, Gijsbert; Duriau, Edouard; van Dijk, Andre; Tabery, Cyrus; Rio, David; de Poortere, Etienne; van de Kerkhof, Mark; Hendrickx, Eric (2023)