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Validation of imaging benefits of Dual Monopole exposures
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Authors
Brunner, Timothy A.
;
Franke, Joern-Holger
;
Truffert, Vincent
;
De Bisschop, Peter
;
Rispens, Gijsbert
;
Duriau, Edouard
;
van Dijk, Andre
;
Tabery, Cyrus
;
Rio, David
;
de Poortere, Etienne
;
van de Kerkhof, Mark
;
Hendrickx, Eric
DOI
10.1117/12.2685543
EISBN
978-1-5106-6749-5
ISBN
978-1-5106-6748-8
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
12750
Title
Validation of imaging benefits of Dual Monopole exposures
Publication type
Proceedings paper
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Date
Summary
2
20.500.12860/43411.2
*
2024-03-04T14:21:41Z
validation by library/open access desk
1
20.500.12860/43411
2024-01-13T17:48:01Z
*Selected version
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