Browsing by author "Duriau, Edouard"
Now showing items 1-7 of 7
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Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Eyben, Pierre; Clemente, Francesca; Vanstreels, Kris; Pourtois, Geoffrey; Sankaran, Kiroubanand; Clarysse, Trudo; Mody, Jay; Duriau, Edouard; Hantschel, Thomas; Vandervorst, Wilfried; Mylvaganam, Kausala; Zhang, Liangchi (2010) -
Analysis and modeling of the HV-SSRM nanocontact on silicon
Eyben, Pierre; Clemente, Francesca; Vanstreels, Kris; Pourtois, Geoffrey; Sankaran, Kiroubanand; Clarysse, Trudo; Mody, Jay; Duriau, Edouard; Hantschel, Thomas; Vandervorst, Wilfried; Mylvaganam, Kausala; Zhang, Liangchi (2009) -
Dopant/carrier profiling for sub-45nm technologies
Vandervorst, Wilfried; Janssens, Tom; Eyben, Pierre; Duriau, Edouard (2005) -
Fabrication of cantilevers and double AFM tips for the nanoprofiler
Duriau, Edouard; Clarysse, Trudo; Hantschel, Thomas; Vandervorst, Wilfried (2007) -
Image contrast metrology for EUV lithography
Brunner, Timothy A.; Truffert, Vincent; Ausschnitt, Kit; Kissoon, Nicola N.; Duriau, Edouard; Jonckers, Tom; van Look, Lieve; Franke, Joern-Holger (2022-09-29) -
New SPM concept for accurate and repeatable tip positioning
Duriau, Edouard; Clarysse, Marc; Moussa, Alain; Vanhaeren, Danielle; Eyben, Pierre; Hantschel, Thomas; Vandervorst, Wilfried (2009) -
Validation of imaging benefits of Dual Monopole exposures
Brunner, Timothy A.; Franke, Joern-Holger; Truffert, Vincent; De Bisschop, Peter; Rispens, Gijsbert; Duriau, Edouard; van Dijk, Andre; Tabery, Cyrus; Rio, David; de Poortere, Etienne; van de Kerkhof, Mark; Hendrickx, Eric (2023)