Fabrication of cantilevers and double AFM tips for the nanoprofiler

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Authors

Duriau, Edouard; Clarysse, Trudo; Hantschel, Thomas; Vandervorst, Wilfried

Issue

5_8

Journal

Microelectronic Engineering

Volume

84

Title

Fabrication of cantilevers and double AFM tips for the nanoprofiler

Publication type

Journal article

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