Authors

Eyben, Pierre; Clemente, Francesca; Vanstreels, Kris; Pourtois, Geoffrey; Sankaran, Kiroubanand; Clarysse, Trudo; Mody, Jay; Duriau, Edouard; Hantschel, Thomas; Vandervorst, Wilfried; Mylvaganam, Kausala; Zhang, Liangchi

ISSN

1071-1023

Issue

2

Journal

Journal of Vacuum Science and Technology B

Volume

28

Title

Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon

Publication type

Journal article