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Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Publication:
Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Date
2010
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Clemente, Francesca
;
Vanstreels, Kris
;
Pourtois, Geoffrey
;
Sankaran, Kiroubanand
;
Clarysse, Trudo
;
Mody, Jay
;
Duriau, Edouard
;
Hantschel, Thomas
;
Vandervorst, Wilfried
;
Mylvaganam, Kausala
;
Zhang, Liangchi
Journal
Journal of Vacuum Science and Technology B
Abstract
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1947
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1947
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations