Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Publication:
Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon
Copy permalink
Date
2010
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Clemente, Francesca
;
Vanstreels, Kris
;
Pourtois, Geoffrey
;
Sankaran, Kiroubanand
;
Clarysse, Trudo
;
Mody, Jay
;
Duriau, Edouard
;
Hantschel, Thomas
;
Vandervorst, Wilfried
;
Mylvaganam, Kausala
;
Zhang, Liangchi
Journal
Journal of Vacuum Science and Technology B
Abstract
Description
Metrics
Views
1952
since deposited on 2021-10-18
2
last month
1
last week
Acq. date: 2026-01-09
Citations
Metrics
Views
1952
since deposited on 2021-10-18
2
last month
1
last week
Acq. date: 2026-01-09
Citations