Browsing by author "Hetel, Iulian"

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High volume manufacturing compatible dry development rinse process (DDRP): patterning and defectivity performance for EUVL

Sayan, Safak; Vanelderen, Pieter; Hetel, Iulian; Chan, BT; Raghavan, Praveen; Blanco, Victor; Foubert, Philippe; D'Urzo, Lucia; De Simone, Danilo; Vandenberghe, Geert (2017)
Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

Herregods, Sebastiaan; Laurent, Lecordier; Vyas, Shashi; Chan, BT; Delande, Tinne; Hetel, Iulian; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2017)