Browsing by author "Gilmore, Ian"

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Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument

Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul (2018)
Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures

Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul (2019)