Authors

Franquet, Alexis; Spampinato, Valentina; Kayser, Sven; Havelund, Rasmus; Gilmore, Ian; Vandervorst, Wilfried; van der Heide, Paul

Conference

FCMN 2019 - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics

Title

Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures

Publication type

Proceedings paper