Browsing by author "Dewilde, Sven"

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ALD barrier deposition on porous low-k dielectric materials for interconnects

Van Elshocht, Sven; Delabie, Annelies; Dewilde, Sven; Meersschaut, Johan; Swerts, Johan; Tielens, Hilde; Verdonck, Patrick; Witters, Thomas; Vancoille, Eric (2011-10)