Browsing by author "Vaenkatesan, Vidya"

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Evaluation of local CD and placement distribution on EUV mask and its impact on wafer

Vaenkatesan, Vidya; Van Adrichem, Paul; Kooiman, Marleen; Kubis, Michael; Van Look, Lieve; Frommhold, Andreas; Gallagher, Emily; Nam, DS; Mulkens, Jan; Finders, Jo; Rispens, Gijsbert (2019)
Impact of an etched EUV mask black border on imaging and overlay

de Kruif, Rob; Davydova, Natalia; Connolly, Brid; Fukugami, Norihito; Lammers, Ad; Philipsen, Vicky; Kondo, Shinpei; Van Setten, Eelco; Vaenkatesan, Vidya; Zimmerman, John; Harned, Noreen (2012)