Evaluation of local CD and placement distribution on EUV mask and its impact on wafer

Publication:

2019

Proceedings Paper

Author(s)

Vaenkatesan, Vidya

;

;

Kooiman, Marleen

;

Kubis, Michael

;

;

;

;

Nam, DS

;

Mulkens, Jan

;

Finders, Jo

;

1972 since deposited on 2021-10-27

Acq. date: 2026-09-10