Publication:

Evaluation of local CD and placement distribution on EUV mask and its impact on wafer

Date

2019
Proceedings Paper
https://doi.org/10.1117/12.2538243
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Author(s)

Vaenkatesan, Vidya
;
Van Adrichem, Paul  
;
Kooiman, Marleen
;
Kubis, Michael
;
Van Look, Lieve  
;
Frommhold, Andreas  
;
Gallagher, Emily  
;
Nam, DS
;
Mulkens, Jan
;
Finders, Jo
;
Rispens, Gijsbert  

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