Browsing by author "Mori, Masato"

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Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETs

Takakura, Kenichiro; Mori, Masato; Yoneoka, Masashi; Tsunoda, Isao; Nakashima, Toshiyuki; Simoen, Eddy; Claeys, Cor (2015)