Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETs

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Authors

Takakura, Kenichiro; Mori, Masato; Yoneoka, Masashi; Tsunoda, Isao; Nakashima, Toshiyuki; Simoen, Eddy; Claeys, Cor

ISSN

1610-1634

Issue

12

Journal

Physica Status Solidi C

Volume

12

Title

Thermal recovery process of electron irradiated Si1-xCx source/drain n-MOSFETs

Publication type

Journal article

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