Browsing by author "Lee, Hsiang-Yun"

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Study of ion and VUV effects on self-assembled organic low-k material exposed to argon plasma

de Marneffe, Jean-Francois; Ljazouli, Rami; Souriau, Laurent; Zhang, Liping; Lee, Hsiang-Yun; Wilson, Chris; Baklanov, Mikhaïl (2012)