Authors

de Marneffe, Jean-Francois; Ljazouli, Rami; Souriau, Laurent; Zhang, Liping; Lee, Hsiang-Yun; Wilson, Chris; Baklanov, Mikhaïl

Conference

MRS Spring Meeting Symposium C: Interconnect Challenges for CMOS Technology

Title

Study of ion and VUV effects on self-assembled organic low-k material exposed to argon plasma

Publication type

Meeting abstract