Browsing by author "Weidner, Ken"

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A new ultra-low K ILD material based on organic-inorganic hybrid resins

Zhong, Ben; Meynen, Herman; Iacopi, Francesca; Weidner, Ken; Malhouitre, Stéphane; Moyer, Eric; Bargeron, Cory; Schalk, Paul; Peck, Alan; Van Hove, Marleen; Maex, Karen (2002)
Optimization of etching and stripping chemistries for Z3MS TM low-k

Lepage, Muriel; Shamiryan, Denis; Baklanov, Mikhaïl; Struyf, Herbert; Mannaert, Geert; Vanhaelemeersch, Serge; Weidner, Ken; Meynen, Herman (2001)