Browsing by author "Kozak, M."

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Marangoni drying: a new concept for drying silicon wafers

Schild, R.; Locke, Klaus; Kozak, M.; Heyns, Marc (1994)
New drying techology for advanced cleaning in IC manufacturing

Meuris, Marc; Mertens, Paul; Schmidt, Harald; Hurd, Trace; Li, Li; Heyns, Marc; Jonckx, Franky; Maex, Karen; Schild, R.; Locke, K.; Kozak, M. (1994)