Browsing by author "Holtzer, Nicolas"

Now showing items 1-1 of 1

Low damage ULK etching by means of high boiling point organic condensation

Chanson, Romain; Holtzer, Nicolas; Lefaucheux, Philippe; Dussart, Rémi; SHEN, Peng; URABE, Keiichiro; Dussarat, Christian; Maekawa, Kaoru; yatsuda, koichi; Tahara, Shigeru; de Marneffe, Jean-Francois (2017)