Publication:

Low damage ULK etching by means of high boiling point organic condensation

Date

2017

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

Chanson, Romain

;

Holtzer, Nicolas

;

Lefaucheux, Philippe

;

;

;

URABE, Keiichiro

;

Dussarat, Christian

;

;

yatsuda, koichi

;

Tahara, Shigeru

;

de Marneffe, Jean-Francois

Statistics

1962 since deposited on 2021-10-24

1last month

Acq. date: 2026-02-24