Low damage ULK etching by means of high boiling point organic condensation

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Authors
Chanson, Romain; Holtzer, Nicolas; Lefaucheux, Philippe; Dussart, Rémi; SHEN, Peng; URABE, Keiichiro; Dussarat, Christian; Maekawa, Kaoru; yatsuda, koichi; Tahara, Shigeru; de Marneffe, Jean-Francois
Conference
Materials Research Society Spring Meeting
Title
Low damage ULK etching by means of high boiling point organic condensation
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Meeting abstract
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