Publication:

Low damage ULK etching by means of high boiling point organic condensation

Date

2017

Meeting abstract

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Author(s)

Chanson, Romain

;

Holtzer, Nicolas

;

Lefaucheux, Philippe

;

;

;

URABE, Keiichiro

;

Dussarat, Christian

;

;

yatsuda, koichi

;

Tahara, Shigeru

;

de Marneffe, Jean-Francois

Statistics

1962 since deposited on 2021-10-24

Acq. date: 2026-03-17