Browsing by author "Worth, W."

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Evaluation of ozonated water spray for resist cleaning applications

De Gendt, Stefan; Lux, Marcel; Claes, Martine; Van Hoeymissen, Jan; Conard, Thierry; Worth, W.; Lagrange, Sébastien; Bergman, E.; Jassal, A. S.; Mertens, Paul; Heyns, Marc (2000)