Publication:

Evaluation of ozonated water spray for resist cleaning applications

Date

2000
Proceedings Paper
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Author(s)

De Gendt, Stefan  
;
Lux, Marcel  
;
Claes, Martine  
;
Van Hoeymissen, Jan
;
Conard, Thierry  
;
Worth, W.
;
Lagrange, Sébastien
;
Bergman, E.
;
Jassal, A. S.
;
Mertens, Paul  
;
Heyns, Marc  

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