Browsing by author "van Dommelen, Y."
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In-line litho cluster monitoring and control using integrated scatterometry
Pollentier, Ivan; Cheng, Shaunee; Baudemprez, Bart; Laidler, David; van Dommelen, Y.; Carpaij, R.; Yu, J.; Uchida, J.; Viswanathan, A.; Chin, D.T.; Barry, K.; Jakatdar, N. (2004-02)