In-line litho cluster monitoring and control using integrated scatterometry

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Authors
Pollentier, Ivan; Cheng, Shaunee; Baudemprez, Bart; Laidler, David; van Dommelen, Y.; Carpaij, R.; Yu, J.; Uchida, J.; Viswanathan, A.; Chin, D.T.; Barry, K.; Jakatdar, N.
Conference
Data Analysis and Modeling for Process Control
Title
In-line litho cluster monitoring and control using integrated scatterometry
Publication type
Proceedings paper
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