Publication:

In-line litho cluster monitoring and control using integrated scatterometry

Date

2004-02
Proceedings Paper
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dc.contributor.authorPollentier, Ivan
dc.contributor.authorCheng, Shaunee
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorLaidler, David
dc.contributor.authorvan Dommelen, Y.
dc.contributor.authorCarpaij, R.
dc.contributor.authorYu, J.
dc.contributor.authorUchida, J.
dc.contributor.authorViswanathan, A.
dc.contributor.authorChin, D.T.
dc.contributor.authorBarry, K.
dc.contributor.authorJakatdar, N.
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorBaudemprez, Bart
dc.contributor.imecauthorLaidler, David
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.date.accessioned2021-10-15T15:33:04Z
dc.date.available2021-10-15T15:33:04Z
dc.date.issued2004-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9450
dc.source.beginpage105
dc.source.conferenceData Analysis and Modeling for Process Control
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage115
dc.title

In-line litho cluster monitoring and control using integrated scatterometry

dc.typeProceedings paper
dspace.entity.typePublication
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