Browsing by author "Sato, Nagisa"

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Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials

Fujikawa, Makoto; de Marneffe, Jean-Francois; Chanson, Romain; Babaei Gavan, Khashayar; Rezvanov, Askar; Lazzarino, Frederic; Tokei, Zsolt; Yamaguchi, T.; Nozawa, N.; Sato, Nagisa (2018)